SEC Filing Summary for AXCELIS TECHNOLOGIES INC

This filing details stock transactions by Eileen Evans, EVP, General Counsel and Secretary of AXCELIS TECHNOLOGIES INC. On May 15, 2026, Ms. Evans acquired 3,893 shares of Common Stock with a transaction price of $0.00, bringing her post-transaction shares to 29,195, as these shares are issuable upon vesting of restricted stock units under the 2012 Equity Incentive Plan, with vesting scheduled for May 15, 2026, 2027, 2028, and 2029, assuming continued employment. Additionally, on the same date, she acquired another 3,893 shares of Common Stock, also valued at $0.00, resulting in 33,088 post-transaction shares. These shares are also tied to restricted stock units granted under the 2012 Equity Incentive Plan and are subject to performance goals related to relative total shareholder return from January 1, 2026, to December 31, 2028, with vesting in 2029. Finally, Ms. Evans disposed of 867 shares of Common Stock at a price of $155.18 per share, reducing her holdings to 32,221 shares. This disposal was for tax withholding purposes related to the vesting of service-based restricted stock units granted in May 2025.