Axcelis Technologies CEO Russell Low Receives RSU Grants and Sells Shares for Tax Withholding

This SEC Form 4 filing reports that Russell Low, President and CEO of Axcelis Technologies Inc., received two restricted stock unit (RSU) grants on May 15, 2026. The first grant of 19,466 shares vests in three equal installments on May 15, 2027, 2028, and 2029. The second grant of 19,466 shares is a performance-based RSU that can earn 0-200% of the granted units based on relative total shareholder return from January 1, 2026 to December 31, 2028, with earned shares vesting in 2029. Concurrently, Low sold 6,891 shares (3,716 + 1,722 + 1,453) at $155.18 per share to cover tax withholding obligations related to the vesting of RSUs from previous years' grants. Following these transactions, Low holds a total of 155,611 shares, of which 108,161 are unvested RSUs subject to forfeiture.